Research on Airborne Resonant Diaphragm Density Sensor 航空机载谐振膜式密度传感器的研究
Signal Delection of Resonant Diaphragm Piezoelectric Ice Sensors 平膜压电谐振式结冰传感器信号检测方法
Based on a novel resonant sensitive micro structure, whose preliminary sensing component is an E-type round diaphragm and the final sensing component is a pair of beam resonators which are located at the inner and outer edges of the E-type round diaphragm, respectively. 对以E型圆膜片为一次敏感元件、一对对称的硅梁谐振子为二次敏感元件的复合差动敏感元件的力学特性进行了分析。
Intelligent Temperature Compensation of Resonant Diaphragm 谐振平膜型结冰传感器的智能温度补偿
Based on analysis of some methods of signal detection of resonant diaphragm piezoelectric ice sensor, this paper proposes an open-loop frequency scan method of the signal detection. 通过对平膜压电谐振式结冰传感器的几种测量方案的分析,提出一种开环扫频的信号检测方法。
A resonant pressure sensor of a novel structure has been developed which consists of a silicon nitride beam supported by a single crystal silicon frame of a special peninsular design, mounting on a silicon diaphragm by bonding. 提出了一种新型结构压力传感器,器件由上下两硅片键合而成,上硅片制作半岛型结构氮化硅谐振梁,下硅片制作矩形压力膜。